High Precision Wafer Dicing Positioning Vision Solution | CKVision APP Secondary Development Vision System

High Precision Wafer Dicing Positioning Vision Solution | CKVision APP Secondary Development Vision System

1. Project Requirements

Precision Parameters

  1. Wafer circuit width: 0.005mm, cutting blade width: 0.003mm
  2. Vision positioning accuracy for cutting: ±0.001mm
  3. Post-cut kerf inspection tolerance: ±0.0005mm

Host Software Integration Requirements

The client independently develops the dicing machine host program, requiring image processing interfaces for dual imaging systems (low-magnification telecentric & high-magnification microscope) to realize 7 core functions:
  1. Real-time dual-camera image display on host software, auto image saving to designated folders;
  2. Auxiliary auto-focus for both imaging systems;
  3. Image calculation via low-magnification telecentric camera to guide platform horizontal correction;
  4. Fit cutting centerline from high-magnification images, calculate deviation from horizontal reference boundary;
  5. Inspect cut kerf to judge whether lines exceed tolerance range;
  6. Multi-spec wafer template learning & storage, one-click template loading for product switching;
  7. Auto extract centerline coordinates, mark upper/lower boundaries on images for cutting guidance.
Deliver complete VS2012 VB.NET Demo program, full debugging support and technical assistance throughout integration.

2. CKVision Overall Solution

2.1 Hardware Standards

  1. Motion Mechanism: Platform flatness & motor positioning accuracy shall be better than 1/2 of overall machine tolerance; ultra-low mechanical jitter to guarantee micron-level positioning; clarify production CT cycle for camera model selection.
  2. Dual-Camera Hierarchical Positioning: Camera 1 for rough positioning, Camera 2 for precise positioning; capture images at left & right positions to fit reference lines, output coordinates & rotation angle to guide cutting. Horizontal & vertical cutting only require 90° tray rotation to reuse positioning logic.
  3. Camera Recommendation: Global shutter small-format industrial cameras, high-speed trigger for on-the-fly capture, short focal lens to ensure sufficient depth of field.

2.2 Secondary Development via OCX Control(CKVision APP)

Adopt embedded development with CKVisionCtrl.ocx(CKVision APP), compatible with VB.NET, C#, C++ and other host development platforms:
  1. One-click control registration via batch script, complete Demo project provided;

  2. 9-point calibration algorithm with Mark point to convert pixel coordinates to physical mechanical coordinates;
  3. Coordinate linkage: Vision reads mechanical coordinates at image capture moment to calculate actual wafer position;
  4. Dual-line fitting positioning: Capture images at left/right FOV, fit two reference lines to generate center baseline & rotation compensation angle.

3. Core Vision Function Introduction

3.1 CKVision APP Control Integration Steps

  1. Run CKVisionReg.bat with administrator privileges to register control;
  2. Tick CKVisionCtrl Control in VS Toolbox COM components, drag to form for quick integration;
  3. Built-in functions: view zoom, view lock, project configuration loading, ready for direct invocation.

3.2 Core Image Algorithms

  1. Multi-point line fitting: Collect dozens of edge scan points to fit upper/lower cutting boundaries, output center coordinates & tilt angle accurately;
  2. Image preprocessing: Filter denoising, gradient threshold adjustment to eliminate wafer texture interference for clear, stable edges;
  3. Shape template matching: Output matching X/Y coordinates & rotation angle to motion platform for automatic correction;
  4. Kerf deviation inspection: Compare with standard centerline, auto trigger NG signal when kerf exceeds tolerance.

3.3 Full Equipment Workflow

  1. Rough Positioning: Camera 1 captures left & right images, fits reference lines, calculates wafer center & rotation angle for tray auto correction;
  2. Precise Positioning: High-magnification camera re-captures dual-side images to fit ultra-precise centerline;
  3. Cutting Execution: Vision transmits coordinate data to blade for cutting; horizontal/vertical switching only needs 90° tray rotation.

4. Matching Requirements for Host & Mechanism

  1. Stable imaging with clear edge separation; image fluctuation ≤ 1/3 of vision tolerance;
  2. Extremely low mechanical vibration to avoid micron-level positioning offset;
  3. Global shutter high-speed camera to support on-the-fly capture and production cycle demands.

5. Full Technical Support Service

  1. Free sample lighting test & professional vision solution report;
  2. On-site software demonstration, hardware model matching & selection;
  3. Graphic programming training for client engineers;
  4. Full assistance for host software joint debugging & stable mass production launch;
  5. Emergency on-site technical support.

6. Solution Advantages

  1. Independently developed CKVision algorithm, complete IP rights including software copyrights & invention patents;
  2. Lightweight CKVision APP control, drastically shorten host software development cycle without complex vision coding;
  3. Hierarchical rough & precise positioning architecture, achieve ±0.001mm ultra-high accuracy for strict semiconductor wafer processes;
  4. Multi-protocol communication support: TCP/IP, IO, RS232, compatible with PLC, motion controllers & robots;
  5. Multi-spec wafer template storage, quick product switching for flexible production lines.
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